There are a number of sites which offer background and information about new areas of MEMS research, as well as opportunities to leverage a range of public and private funding sources. This is a sampling of the research now ongoing at a number of universities and labs around the world. Different research sites will be highlighted regularly.
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http://www.el.utwente.nl/tt/index.html
This is the MESA Research Institute, based in the Netherlands. It is one of the leading groups in the world in the field of Micro System Technology (MST). Research is focused on the design and fabrication of MicroElectroMechanical Systems (MEMS), Micro Chemical Systems (MiCS,) and fabrication technology.
http://www.imsas.uni-bremen.de
Associated with the University of Bremen, Germany, the Institute for Microsensors, Actuators and Systems (IMSAS), was founded in 1992, and focuses on Research and Development on miniaturized multifunctional systems and system-related components, such as sensors and actuators.
http://www.nd.edu/~ame/facultystaff/gadelhak.jpeg
A compendium of MEMS-related research being conducted by Professor Mohamed Gad-el-Hak at the University of Notre Dame, including such topics as micropumps and the use of MEMS-based sensors for measuring wall-shear stress.
http://www.mtl.umn.edu/mtlpage/
The University of Minnesota runs a Microtechnology Lab (MTL) which facilitates microelectronics and related research involving microfabrication. Some of the current technologies being researched at MTL are surgical microinstruments and bioanalytical microsystems.
http://uc-industry.berkeley.edu/sectorprograms/smart.htm
University of CA Semiconductor Manufacturing Alliance for Research and Training. This site outlines sectors of university/industry research grants, including semiconductors and MEMS. It launches 15-20 new research partnerships totaling approximately $8 million every year. Some of the partnerships are of relatively large scale. SMART is exploring new models of research partnerships, encouraging proposals involving industry consortia and multi-campus research plans organized into major program projects. These major projects are intended to help overcome major impediments that slow progress industry-wide, thereby providing a competitive advantage to California firms.
http://mems.nist.gov
The site for the National Institute of Science & Technology that has substantial information on research into MEMS devices.
http://mems.nist.gov
Funding opportunities through NIST
http://www.nttc.edu/resources/funding/current.asp
National Technology Transfer Center; more avenues for funding/commercialization opportunities with SBIRs, STTRs
http://www.darpa.mil/mto/solicitations/
Microsystems Technology Office of the Defense Advanced Research Projects Agency (DARPA)
http://www.darpa.mil/mto/mems/summaries/Projects/index.html
A list of DARPA MEMS research projects
http://www.darpa.mil/baa/
A listing of technology projects, funded in part by DARPA