www.darpa.mil/MTO/MEMS
The Microsystems Technology Office (MTO) focuses on the
heterogeneous microchip-scale integration of electronics, photonics, and
microelectromechanical systems (MEMS) to produce a broad array of interface
systems; sensors, sources, actuators, displays; and signal processors;
packaging and interconnect systems.
mems.sandia.gov
Sandia National Labs site with an excellent section on
MEMS, including the following:
-About MEMS (general, vision for future)
-Very cool image and movie gallery (see a spider mite spin on a
MEMS device)
-List of links: DoD, academic institutions (UCLA, Stanford,
Berkeley)
-Bibliography: searchable technical bibliography: general, sensors,
modeling
www.eeel.nist.gov/812/44.htm
Another NIST site, which describes the range of
research projects the government scientists are undertaking , includes:
-MEMS technology, standards, research
|
|
www.arpa.mil
DARPA - Defense Advanced Research Projects Agency -
Central research and development organization for the Department of Defense
(DoD). It manages and directs selected basic and applied research and
development projects for DoD, and pursues research and technology where risk
and payoff are high. The site includes news and links to DARPA's offices.
mems.nist.gov
National Institute of Standards and Technology MEMS
research site, includes:
- microfab facility overview
- good publications list, focus on fabrication
|
|
