http://spie.org/app/Publications/ -- The International Society for Optical Engineering website has tables of contents for over 4,000 volumes and 150,000 journal and proceedings abstracts in SPIE's publications database, as well as information on new books from SPIE PRESS and links to SPIE's magazines. Resources include books on MEMS, optical science, communications and more.

http://www.electronics.ca/bstr/index.html – Electronics engineering online bookstore with books organized by categories such as semiconductors, telecom and electronic components.

http://www.people.cornell.edu/pages/akt1/books.html–a Cornell University site, which presents all books, required or recommended, for MEMS courses at universities around the country.

http://www.elsevier.com/homepage/ -- a scientific publishing house portal page with the ability to search for a range of scientific areas, books and other publications.

http://mems.nist.gov/ -- A site with frames; please select “publications” from the menu bar to link to the bibliography. Site includes downloadable articles written by NIST scientists and published at conferences and in scientific journals.

Introductory Articles

Joe McEntee. Start Making Microsensors, Physics World, December 1993, pp 33-37.
J Bryzek, K Petersen, W McCulley. Micromachines on the March, IEEE Spectrum, 31 (5), May 1994, pp 20-31.
A Heuberger. Silicon Microsystems, Microelectronic Engineering, 21, 1993, pp 445-458.

Introductory Technical Articles

IEE Colloquium on: Microengineering - the Future, held at the IEE, Savoy Place, London, 13 October 1993. Digest No: 1993/182.
IEE Colloquium on: Microengineering in Instrumentation, held at the IEE, Savoy Place, London, 16 November 1993. Digest No: 1993/218.
IEE Colloquium on: Medical Applications of Microengineering, held at the IEE, Savoy Place, London, 31 January 1996. Ref: 96/019

Technical Articles

DV Morgan, K Board. An Introduction to Semiconductor Microtechnology, John Wiley & Sons, 1985.
Notes from a two day short course on: Micromachining of Materials, held at the University of Southampton, 25 & 26 March 1992. University of Southampton Institute of Transducer Technology.

Books for Further Reading

The Art of Electronics, P Horowitz, W Hill., 2nd edn., 1989

Beyond Your Senses : The New World of Sensors, Hal Hellman 1997

Biosensors : A Practical Approach , AEG Cass (ed.)., 1990.

Biosensors , EAH Hall., 1990

Chemical Microsensors and Applications, Stephanus Buettgenbach (Editor) 1998

Chemical Microsensors and Applications II, Stephanus Buettgenbach (Editor) 1999

Design, Characterization, and Packaging for Mems and Microelectronics, Bernard Courtois (Editor) 1999

Design, Test, Integration, and Packaging of MEMS and MOEMS, Bernard Courtois (Editor)

Electromechanical Sensors and Actuators (Mechanical Engineering Series), Ilene J. Busch-Vishniac 1998

Electronics and Structures for MEMS, Neil W. Bergmann (Editor) 1999

Fundamentals of Microfabrication, Marc Madou 1997

Handbook of Microlithography, Micromachining, & Microfabrication, P. Rai-Choudhury (Editor) 1997

An Introduction to Microelectromechanical Systems Engineering, Nadim Maluf 1999

The Investor's Guide to Nanotechnology and Micromachines, Glenn Fishbine

Mechanical Microsensors (Microtechnology and MEMS), M. Elwenspoek; Remco J. Wiegerink

MEMS: Powerhouse for Growth in Sensors, Actuators and Control Systems – a compilation of materials published under this name

Methodology for the Modeling and Simulation of Microsystems, BF Romanowicz

Microelectronic Structures & Mems for Optical Processing III (Volume 3226) M. Edward Motamedi (Editor)

Micromachined Transducers Sourcebook, Gregory TA Kovacs

Micromechanics and Mems : Classic and Seminal Papers to 1990, William Trimmer, 1997

Microsensors, RS Muller, RT Howe, SD Senturia, RL Smith, RM White (eds.), 1991.

Microsensors, MEMS and Smart Devices, Julian W. Gardner - Just published in Dec '01

Microsensors : Principles and Applications, JW Gardner,1994

Microsystem Technology and Microrobotics, Ulrich Rembold (Contributor); Sergej Fatikow 1997

Optical MEMS: Worldwide Markets for a Strategic and Convergent Technology – a very expensive research study

Newnes Electronics Engineer's Pocket Book, EA Parr (ed.)., 5th edn., 1986

Selected Papers on Optical MEMS, Victor M. Bright

SemiConductor Wafer Bonding: Science and Technology. QY Tong 1998

Silicon Micromachining, M. Elwenspoek; HV Jansen 1999

Sensor Technology and Devices, L Ristic (ed.)., 1994.